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Umncintiswano we-EUV ufinyelela kumishini yangaphakathi ye-semiconductor

Sizungeze isizukulwane esisha sobuchwepheshe bokwenza imishini ye-semiconductor "EUV (Extrem Ultraviolet Light)", umncintiswano phakathi kwezinkampani zemishini usuqhakazile. ITokyo Electronics izothuthukisa izindleko zentuthuko ephezulu ngonyaka wezimali ka-2020 (ukusuka ngoMashi 2021), futhi incwadi yoku-oda yeLasertec iphindaphindwe kabili ngonyaka owedlule. Emakethe yemishini ehlobene ne-EUV, i-ASML yaseDutch ilawula umshini we-lithography we-lithograph, kepha emkhakheni wokuhlola nomthombo wokukhanya, ukuba khona kwezinkampani zaseJapan nakho kuyathuthuka.

UToshiki Kawai, uMongameli weTokyo Electronics, umenzi wesithathu ngobukhulu emhlabeni okhiqiza imishini yezokwakha ama-semiconductor, uthe: "Uma i-EUV idumile, kuzodingeka inani lemishini ephezulu kakhulu." Ngonyaka wezimali ka-2020, kuzotshalwa irekhodi eliphezulu lama-yen ayizigidi eziyizinkulungwane ezingama-135 ocwaningweni nasezindleko zokuthuthuka. .

Inzuzo yeTokyo Electronics ithi "Coater Developer". Le mishini isetshenziselwa ukupheka uketshezi lwamakhemikhali olukhethekile kufafaza le-silicon njengezinto ze-semiconductor zokuyithuthukisa. Emkhakheni wemishini yokukhiqiza ngobuningi ye-EUV, isabelo semakethe sale nkampani singu-100%. Ukuthengisa okuhlanganisiwe kwalonyaka wezimali kulindeleke ukuthi kufinyelele ku-yen 1. tr trion yen. Ngaphezu kwe-10% yalokhu kuzosetshenziselwa ucwaningo nentuthuko ukuhlanganisa umkhawulo oholayo esigabeni sokuthandwa yi-EUV.

Emakethe yezimpahla zokukhiqiza ze-semiconductor ezingaphezu kuka-6 trillion yen ngonyaka, kwenzeka izinguquko ezinkulu kakhulu.

Ukukhanya kahle ububanzi bomugqa wesifunda we-semiconductor, ukuphakama kokusebenza, kanye nomkhiqizo wanamuhla wokusika onqenqemeni ngama-nanometers ayi-5. Ukudlulisa umjikelezo omncane onjalo kufafaza le-silicon, umshini we-lithograph ye-EUV ubaluleke kakhulu. Ngokuhlinzekwa okwandayo kwe-ASML, okuwukuphela kwendlela ekhiqizwe ngobuningi be-EUV emhlabeni, umncintiswano wokuthuthuka kubandakanya imishini yangaphandle efana nokuhlanganisa nemithombo yokukhanya nakho sekuqalile.

Isibonakaliso senguquko eshintshayo yi-Lasertec yokukhiqiza imishini yokuhlola. Uma kunesiphene ku-Photomask njengebhodi lasekuqaleni lesiyingi, izinga lesiphuphu le-semiconductor lizokhuphuka ngokufanele. Le nkampani ikhiqiza imishini yokuhlola esekela i-EUV, futhi imiyalo yayo kusukela ngoJulayi 2019 kuya ku-Mashi 2020 inyuke izikhathi ezingama-2.2 kusukela esikhathini esifanayo ngonyaka owedlule, ifinyelela ku-65,8 billion yen. Ababili kwabathathu bama-oda wonyaka kulindeleke ukuthi bahlobane ne-EUV.

Ngaphezu kwalokho, izingxabano ezesabekayo phakathi kwezinkampani zaseJapan nazo zenzeka. Emkhakheni wemishini yokubhala imishayo ye-elektroni, iToshiba yeNuFlare Technology ithola ukuhlangana phakathi kweJEOL ne-IMS NANOFABRICATION (e-Austria). Kugxilwe kakhulu ekuthuthukisweni kobuchwepheshe be- "Multi-Beam" kusetshenziswa imishayo ye-laser engu-260,000.

NgoJanuwari, uToshiba wachitha i-HOYA, eyasungula i-TOB enobudlova (ukunikezwa kwamathenda omphakathi), futhi yahlanganisa nokulawula kwayo iNiu Fulai. Ochwepheshe abangama-25 abasanda kuthunyelwa, njll., Bahlela ukunikezela ngemishini esetshenziselwa isizukulwane esilandelayo se-EUV ngaphakathi kuka-2020.

IGigaphoton (etholakala e-Oyama City, eTochigi Prefecture), inkampani esekela iKomatsu ekhiqiza imithombo ye-laser, ibheke phambili ekubuyeni kwayo. Ngaphambi kokuqala kwe-EUV, le nkampani yaba ngomunye wababili abaphambili emkhakheni wemithombo ekhanyayo yemishini ye-lithography. Kodwa-ke, ngenxa yezizathu ezinjengokutholwa komncintiswano yi-ASML, okwamanje ilahlekelwa ubukhona bayo. IGigaphoton ilwela ukuthuthukisa izingxenye zemithombo ekhanyayo ephezulu ngaphambi kokuthi i-ASML yethule imishini elandelayo ye-EUV ukuze iphinde ithole isabelo semakethe.

Isizinda sezinkampani ezisheshayo ukuthuthukiswa kwemishini ye-EUV ngumncintiswano we-miniaturization owethulwe ngabakwaSamsung Electronics kanye ne-TSMC yaseNingizimu Korea. Isidingo sokusebenza okuphezulu kwe-semiconductors efana ne-5G sinamandla, futhi lezi zinkampani zombili zincintisana ngomshini ngamunye we-ASML womgraphy obiza ngaphezu kwe-yen eyizigidi ezingama-20. Kule nqubo, amathuba ebhizinisi ezinkampani zokwakha eziseduze nawo ayanda.

Izibalo ezivela kwi-International Semiconductor Equipment and Equipment Association (SEMI) kanye ne-Semiconductor Manufacturing Equipment Association of Japan (SEAJ) zibonisa ukuthi isabelo semakethe semishini yokwenza izinto ze-semiconductor esenziwe eJapan sasingu-31.3% ngonyaka ka-2019, okhiphe cishe u-30% esikhathini esidlule. Iminyaka engama-20.

Emkhakheni wemishini ye-lithography, uNikon noCanon bake bakhukhula imakethe yomhlaba, kepha bahluleka emncintiswaneni ne-ASML futhi bawela emuva ekuthuthukisweni kwe-EUV. Emkhakheni we-semiconductor, njengoba inqubo yokukhiqiza iba nzima, ukuthambekela kokunqoba konke kuyanda. Ushintsho olukhulu olwenziwa yi-EUV njengethuba luzosheshisa nokusinda kwabanamandla kakhulu ezinkampanini zemishini.

"Ukutshalwa kwezimali kwemishini yokusika emakethe yezwe kuphelile," inhloko yezindawo ezihlobene ne-EUV kanye nezinkampani zezingxenye ikhungatha. Njengoba uhulumeni waseDashi engayivumanga, i-ASML ihlulekile ukuthumela imishini ye-EUV lithography ezwenikazi. Ngaphezu kwalokho, ukuthengwa kwemishini yokuphelela nezingxenye nakho kumisiwe.

Kukhona ukungezwani kwezohwebo phakathi kweChina ne-US ngemuva kwayo. Uma imishini ye-ASML ingenakungeniswa, abakhiqizi be-semiconductor bamazwe amakhulu bazosala bancintisane emncintiswaneni we-miniaturization. Uhulumeni wezwekazi ubeka phambili inhloso yokuthi izinga lokugcwala kwe-semiconductor lizofinyelela ku-40% ngo-2020 no-70% ngo-2025, kepha lokhu kunzima ukukufeza. Imibono eminingi ikholelwa ukuthi i-United States yacindezela uhulumeni waseDashi ukuthi ayisebenzise njengesijeziso senhlawulo.

Izibalo ezivela kwi-International Semiconductor Equipment and Equipment Association zikhombisa ukuthi imakethe yezokwakha imishini yezokwakha ama-semiconductor ngonyaka ka-2019 ibingama-59,7 billion amadola aseMelika, okuwukwanda ngo-59% ngaphezulu konyaka we-2014. Ngalesi sikhathi, imakethe yezwe ikhuphule ubukhona bayo, kanye nengxenye yayo yomhlaba imakethe jikelele inyuke isuka ku-11.6% ngonyaka ka-2014 yaya kuma-22,5%. Ezinkampanini zokwakha zemishini yaseJapan semiconductor, izwe elikhulu seliyimakethe okunzima ukuyishaya indiva.

Ukuthuthukiswa kobuchwepheshe be-EUV kunzima, futhi izindleko ze-R&D zazo zonke izinkampani ziyanda. Uma imakethe ingasakhuphi, ukubuya kwemali ekutshaleni kwamabhizinisi kuzolibaziseka, futhi ukuthuthukiswa kobuchwepheshe obusha kungaba nzima ukuqhubekisela phambili.